Aluminum nitride has higher thermal conductivity. The inertia is extremely stable under high temperature environment. In the air, the substance's surface will become oxidation when the temperature higher than 700℃. In normal temperature, the substance's surface still has 5 to 10 nano oxidation membrane. When the temperature reach to 1370℃, the oxidation membrane still can protect the substance. However, when the temperature higher than 1370℃, the whole substance will frequently react oxidation. Straight up to 980℃, the aluminum nitride would be still stable in hydorgen and carbon dioxide. Nowadays, aluminum nitride is widely used on cooling substrate and semiconductor process.

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