1. When the airflow setting is sending out of ceramic (negative vacuum pressure), it can absorb the workpieces.
2. When the airflow setting is sending in of ceramic (positive vacuum pressure), it can blow up the workpieces or no-contacting with ceramic.
Application
Semi-conductor Industrial can use on: 1. Wafer Transportation
2. Wafer Dicing
3. Laser Dicing
4. Wafer Grinding
5. Wafer Cleaning
LONGYI PRECISION provides the porous ceramic and different shapes of chuck, square, and round. And the different applying chuck.
Besides, we also have different size ceramic, including 4", 6", 8", 9" and 12".
The Vacuum Chuck Table's Material
The Vacuum Chuck's table can be made from different materials.
The table's materials could be SUS, granite, ceramic, and aluminum.